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什么是cmp工艺? - 知乎
Apr 12, 2020 · CMP剖视图 CMP设备与其他前段工艺设备不同,是机械加工设备。 CMP装置类似于对晶圆的表面进行镜面抛光所使用的抛光机,以及减薄机(打磨晶片背面的装置)。 它们 …
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Forum - CMP Forums
Dec 26, 2025 · Forum Description Please post your questions and comments regarding CMP 1911 Sales here! Welcome to the new 1911 sub-forum, we at CMP 1911 / CMP, appreciate …
CMP 1911 - CMP Forums
Please post your questions and comments regarding CMP 1911 Sales here! Welcome to the new 1911 sub-forum, we at CMP 1911 / CMP, appreciate your support. This sub-forum is for the …
IC或半导体元器件制程工艺中的CMP是指什么? - 知乎
Aug 24, 2021 · 来自:电子元器件;IC前道工艺中的EMP 开宗明义,定义先行。首先我们要知道的是:什么是CMP? CMP全称:Chemical-Mechanical Planarization,翻译来就是:化学机械 …
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化学机械抛光CMP技术是怎么样的? - 知乎
在半导体制造过程中,化学机械抛光(Chemical Mechanical Polishing,简称CMP)技术是实现 晶圆表面高度平坦化 的关键步骤。本文将详细介绍CMP技术的工作原理、应用领域以及其在全 …
入职半导体公司,八大工艺和部门应该怎么选择和规划? - 知乎
在这样的情况下,一种革命性的抛光技术脱颖而出,固定研磨粒抛光工艺(Fixed-Abrasive STI CMP,FA STI CMP),成功地将凹陷降低至<100Å(约100μm宽的沟槽)。 然而任何东西总 …