Optical 3D metrology enables fast, non-contact surface roughness measurement of defects and roughness for precise ...

Detecting sub-5nm defects creates huge challenges for chipmakers, challenges that have a direct impact on yield, reliability, and profitability. In addition to being smaller and harder to detect, ...

Defects in transistors, such as unwanted impurities and broken chemical bonds in the various layers of the semiconductor, can limit their performance and reliability. These defects are becoming harder ...